Research Achievement Search

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[Energy Transfer Dynamics] include Division

Journal Publication

Title Research achievements summary Name
Low-temperature formation of c-axis orientated aluminum nitride thin films with plasma-assisted reactive pulsed-DC magnetron sputtering   Japanese Journal of Applied Physics,57,(2017),01AD06-1-01AD06-5 Kosuke Takenaka
Yoshikatsu Satake
Giichiro Uchida
Yuichi Setsuhara
Selective production of reactive oxygen and nitrogen species in the plasma treated water by using a nonthermal high-frequency plasma jet   Japanese Journal of Applied Physics,57,1(2017),0102B4-1-0102B4-6 G. Uchida
K. Takenaka
K. Takeda
K. Ishikawa
M. Hori
Y. Setsuhara
Development of a non-equilibrium 60 MHz plasma jet with a long discharge plume   Journal of Applied Physics ,122,(2017),033301-1-033301-8 Giichiro Uchida
Kazufumi Kawabata
Taiki Ito
Kosuke Takenaka
Yuichi Setsuhara

Lecture

Title Research achievements summary Name
Plasma-Enhanced Reactive Processes for Low-Temperature Formation of High-Mobility IGZO Thin Film Transistor and Functional Films for Solar Cells 5th Japan-Korea Joint Symposium on Advanced Solar Cells 2018 and 2nd International Symposium on Energy Research and Application,Suwon,Korea,(2018.02.05-2018.02.06) Yuichi Setsuhara
Masashi Endo
Kosuke Takenaka
Giichiro Uchida
Akinori Ebe
Advanced Plasma Processing for Formation of Functional Thin Films Int. Conf. on Materials and Systems for Sustainability 2017 (ICMaSS2017) in conjunction with 2nd Int. Symp. on Creation of Life Innovation Materials for Interdisciplinaryand Int. Researcher Development (iLIM-2),Nagoya, Japan ,(2017.09.29-2017.10.02) K. Takenaka
G. Uchida
K. Ide
T. Kamiya
Y. Setsuhara
Advanced ICP-Enhanced Plasma Systems for Meters-Scale Large-Area Processes The 11th Asian-European International Conference on Plasma Surface Engineering,Jeju, Korea,(2017.09.11-2017.09.15) Akinori Ebe
Kazuaki Nishisaka
Kazuto Okazaki
Atsushi Osawa
Kosuke Takenaka
Yuichi Setsuhara
Functional Thin Film Deposition by Advanced Plasma Assisted CVD & PVD Process International union of materials research societies-The 15th International conference of advanced materials,Kyoto, Japan,(2017.08.27-2017.09.01) Kosuke Takenaka
Masashi Endo
Giichiro Uchida
Y. Setsuhara
 
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