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雑誌掲載論文

表 題 研究業績概要 氏 名
Low-temperature formation of c-axis orientated aluminum nitride thin films with plasma-assisted reactive pulsed-DC magnetron sputtering   Japanese Journal of Applied Physics,57,(2017),01AD06-1-01AD06-5 Kosuke Takenaka
Yoshikatsu Satake
Giichiro Uchida
Yuichi Setsuhara
Selective production of reactive oxygen and nitrogen species in the plasma treated water by using a nonthermal high-frequency plasma jet   Japanese Journal of Applied Physics,57,1(2017),0102B4-1-0102B4-6 G. Uchida
K. Takenaka
K. Takeda
K. Ishikawa
M. Hori
Y. Setsuhara
Development of a non-equilibrium 60 MHz plasma jet with a long discharge plume   Journal of Applied Physics,122,(2017),033301-1-033301-8 Giichiro Uchida
Kazufumi Kawabata
Taiki Ito
Kosuke Takenaka
Yuichi Setsuhara

国際会議発表,国内学会発表

表 題 研究業績概要 氏 名
プラズマ支援反応性パルスDCスパッタリングによるC軸配向窒化アルミニウム薄膜の形成 第65回応用物理学会春季学術講演会,,(2018.03.17-2018.03.20), 竹中 弘祐
吉谷 友希
内田 儀一郎
節原 裕一
プラズマ支援反応性プロセスを用いた高移動度IGZO薄膜の低温形成 第65回応用物理学会春季学術講演会,,(2018.03.17-2018.03.20), 節原 裕一
遠藤 雅
竹中 弘祐
内田 儀一郎
江部 明憲
非平衡プラズマジェットと水溶液中アミノ酸との相互作用に関する研究 第65回応用物理学会春季学術講演会,,(2018.03.17-2018.03.20), 内田 儀一郎
美濃 祐資
鈴木 天翔
竹中 弘祐
節原 裕一
Analysis of amino acids in plasma-activated water with mass spectrometer 10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2018) / 11th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2018),Meijo University, Nagoya, Japan,(2018.03.04-2018.03.08), Giichiro Uchida
Yusuke Mino
Tensho Suzuki
Kosuke Takenaka
Yuichi Setsuhara
Low-temperature fabrication of high-performance IGZO thin film transistor using plasma-assisted reactive processes 10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2018) / 11th International Conference on Plasma Nano Technology & Science(IC-PLANTS 2018),Meijo University, Nagoya, Japan,(2018.03.04-2018.03.08), Kosuke Takenaka
Masashi Endo
Tomoki Yoshitani
Giichiro Uchida
Yuichi Setsuhara
Akinori Ebe
Plasma-Enhanced Reactive Processes for Low-Temperature Formation of High-Mobility IGZO Thin Film Transistor and Functional Films for Solar Cells 5th Japan-Korea Joint Symposium on Advanced Solar Cells 2018 and 2nd International Symposium on Energy Research and Application,Sungkyunkwan University, Swuon, South Korea,(2018.02.05-2018.02.06), Yuichi Setsuhara
Masashi Endo
Kosuke Takenaka
Giichiro Uchida
Akinori Ebe
機能性材料創成に向けたプラズマプロセス 第26回 プラズマ医療 サイエンスの扉/第26回 サイエンスカフェ-プラズマ医療-,名古屋大学,(2017.12.15), 竹中 弘祐
Development of a 60 MHz nonthermal plasma jet and selective production of reactive oxygen and nitrogen species in the plasma treated water 第27回日本MRS年次大会,横浜市開港記念館 他,(2017.12.05-2017.12.07), Giichiro Uchida
Yusuke Mino
Tensho Suzuki
Kosuke Takenaka
Yuichi Setsuhara
Development of plasma-assisted reactive sputtering processes for functional thin films formation 第27回日本MRS年次大会,横浜市開港記念館 他,(2017.12.05-2017.12.07), Kosuke Takenaka
Yoshiki Yoshitani
Giichiro Uchida
Yuichi Setsuhara
Fabrication of High Mobility IGZO Thin Film Transistor at Low Temperature using Plasma-assisted Reactive Processes 第27回日本MRS年次大会,横浜市開港記念館 他,(2017.12.05-2017.12.07), Masashi Endo
Kosuke Takenaka
Giichiro Uchida
Yuichi Setsuhara
Akinori Ebe
Oxidation and decomposition of amino acids in water induced by plasma irradiation 第27回日本MRS年次大会,横浜市開港記念館 他,(2017.12.05-2017.12.07), Yusuke Mino
Giichiro Uchida
Tensho Suzuki
Kosuke Takenaka
Yuichi Setsuhara
非平衡プラズマジェット照射溶液中のアミノ酸成分に関する液体クロマトグラフ質量分析 Plasma Conference 2017,姫路商工会議所,(2017.11.21-2017.11.24), 内田 儀一郎
美濃 祐資
竹中 弘祐
節原 裕一
誘導結合プラズマ支援反応性DCパルススパッタリングを用いた窒化アルミニウム薄膜の堆積 Plasma Conference 2017,姫路商工会議所,(2017.11.21-2017.11.24), 竹中 弘祐
内田 儀一郎
節原 裕一
Formation of c-axis Orientated AlN Films Using ICP-enhanced Reactive DC-pulsed Sputtering 39th International Symposium on Dry Process (DPS2017),Tokyo, Japan,(2017.11.16-2017.11.17), Kosuke Takenaka
Yoshikatsu Satake
Giichiro Uchida
Yuichi Setsuhara
Low-Temperature Formation of High-Mobility IGZO Thin Film Transistors Using ICP-Enhanced Reactive Plasma Processes 39th International Symposium on Dry Process (DPS2017),Tokyo, Japan,(2017.11.16-2017.11.17), Yuichi Setsuhara
Masashi Endo
Kosuke Takenaka
Giichiro Uchida
Akinori Ebe
Advanced Plasma Processing for Formation of Functional Thin Films International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017) in conjunction with 2nd International Symposium on Creation of Life Innovation Materials for Interdisciplinaryand International Researcher Development (iLIM-2) ,Nagoya, Japan,(2017.09.29-2017.10.02), Kosuke Takenaka
Giichiro Uchida
Keisuke Ide
Toshio Kamiya
Yuichi Setsuhara
Development of Low-Temperature Plasma Process for High Quality Functional Films Formation International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017) in conjunction with 2nd International Symposium on Creation of Life Innovation Materials for Interdisciplinaryand International Researcher Development (iLIM-2) ,Nagoya, Japan,(2017.09.29-2017.10.02), Yuichi Setsuhara
Kosuke Takenaka
Giichiro Uchida
Keisuke Ide
Toshio Kamiya
Effects of film microstructures on operation characteristics of amorphous In-Ga-Zn-O thin-film transistors International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017) in conjunction with 2nd International Symposium on Creation of Life Innovation Materials for Interdisciplinaryand International Researcher Development (iLIM-2) ,Nagoya, Japan,(2017.09.29-2017.10.02), Keisuke Ide
Masato Ota
Takayoshi Katase
Kosuke Takenaka
Yuichi Setsuhara
Atsushi Hiraiwa
Hiroshi Kawarada
Hidenori Hiramatsu
Hideo Hosono
Toshio Kamiya
Functionalization of Organic Material Surfaces for Development of Functional Materials International Conference on Materials and Systems for Sustainability 2017 (ICMaSS2017) in conjunction with 2nd International Symposium on Creation of Life Innovation Materials for Interdisciplinaryand International Researcher Development (iLIM-2) ,Nagoya, Japan,(2017.09.29-2017.10.02), Yuichi Setsuhara
Kosuke Takenaka
Giichiro Uchida
Advanced ICP-Enhanced Plasma Systems for Meters-Scale Large-Area Processes The 11th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2017),Jeju, Korea,(2017.09.11-2017.09.15), Akinori Ebe
Kazuaki Nishisaka
Kazuto Okazaki
Atsushi Osawa
Kosuke Takenaka
Yuichi Setsuhara
Development of an atmospheric pressure very-high-frequency plasma jet The 11th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2017),Jeju, Korea,(2017.09.11-2017.09.15), Giichiro Uchida
Taiki Ito
Kosuke Takenaka
Junichiro Ikeda
Yuichi Setsuhara
Low-Temperature Formation of High-Mobility IGZO Thin Film Transistors for Flexible Electrinics with ICP-Enhanced Reactive Plasma Processes The 11th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2017),Jeju, Korea,(2017.09.11-2017.09.15), Kosuke Takenaka
Yuichi Setsuhara
Masashi Endo
Giichiro Uchida
Akinori Ebe
プラズマ支援パルスDCマグネトロンスパッタリングによる結晶化窒化アルミニウム薄膜の低温形成 第78回応用物理学会秋季学術講演会 ,福岡,(2017.09.05-2017.09.08), 竹中 弘祐
佐竹 義旦
内田 儀一郎
節原 裕一
プラズマ支援反応性スパッタ製膜を用いた高移動度IGZO薄膜トランジスタの形成(II) 第78回応用物理学会秋季学術講演会 ,福岡,(2017.09.05-2017.09.08), 節原 裕一
遠藤 雅
竹中 弘祐
内田 儀一郎
江部 明憲
長尺高周波非平衡プラズマジェットの開発 第78回応用物理学会秋季学術講演会 ,福岡,(2017.09.05-2017.09.08), 内田 儀一郎
伊藤 泰喜
竹中 弘祐
節原 裕一
Functional Thin Film Deposition by Advanced Plasma Assisted CVD & PVD Process IUMRS The15th Intesrnational Conference on Advanced Materials (IUMRS-ICAM 2017), Kyoto, Japan,(2017.08.27-2017.09.01), Kosuke Takenaka
Masashi Endo
Yuichi Setsuhara
Giichiro Uchida
Irradiation of a nonequilibrium plasma jettoliquidwaterwith amino acids IUMRS The15th Intesrnational Conference on Advanced Materials (IUMRS-ICAM 2017), Kyoto, Japan,(2017.08.27-2017.09.01), Giichiro Uchida
Yusuke Mino
Taiki Ito
Kosuke Takenaka
Yuichi Setsuhara
Low-Temperature Formation of High-Mobility IGZO Thin Film Transistor by Advanced Reactive Sputter Deposition Enhanced with ICP Frontiers in Materials Processing Applications, Research and Technology,Bordeaux, France,(2017.07.09-2017.07.12), Yuichi Setsuhara
Masashi Endo
Kosuke Takenaka
Giichiro Uchida
Akinori Ebe

講演

表 題 研究業績概要 氏 名
プラズマ支援反応性プロセスを用いた高移動度IGZO薄膜の低温形成 第65回応用物理学会春季学術講演会,東京,(2018.03.18-2018.03.21) 節原 裕一
遠藤 雅
竹中 弘祐
内田 儀一郎
江部 明憲
ダストプラズマプロセスの開発とエネルギーデバイスへの応用展開 第33回先端プラズマ技術研究会,名古屋,(2018.02.16) 内田 儀一郎
Plasma-Enhanced Reactive Processes for Low-Temperature Formation of High-Mobility IGZO Thin Film Transistor and Functional Films for Solar Cells 5th Japan-Korea Joint Symposium on Advanced Solar Cells 2018 and 2nd International Symposium on Energy Research and Application,Suwon,Korea,(2018.02.05-2018.02.06) Yuichi Setsuhara
Masashi Endo
Kosuke Takenaka
Giichiro Uchida
Akinori Ebe
機能性材料創成に向けたプラズマプロセス 第26回 プラズマ医療 サイエンスの扉/第26回 サイエンスカフェ-プラズマ医療-,名古屋,(2017.12.15) 竹中 弘祐
Development of a 60 MHz non-thermal plasma jet and selective production of reactive oxygen and nitrogen species in the plasma treated water 27th Annual Meeting of MRS-Japan 2017 International Symposium "Frontier of nano-materials based on advanced plasma technologies"
,Yokohama, Japan,(2017.12.05-2017.12.07)
G. Uchida
Y. Mino
T. Suzuki
K. Takenaka
Y. Setsuhara
Development of a 60 MHz nonthermal plasma jet and selective production of reactive oxygen and nitrogen species in the plasma treated water 第27回日本MRS年次大会,横浜,(2017.12.05-2017.12.07) Giichiro Uchida
Yusuke Mino
Tensho Suzuki
Kosuke Takenaka
Yuichi Setsuhara
反応性ダストプラズマプロセスの開発とナノ粒子デバイスへの応用 PLASMA2017 Workshop プラズマによるナノ材料・ナノデバイス創成の深化,姫路,(2017.11.20) 内田 儀一郎
Advanced Plasma Processing for Formation of Functional Thin Films Int. Conf. on Materials and Systems for Sustainability 2017 (ICMaSS2017) in conjunction with 2nd Int. Symp. on Creation of Life Innovation Materials for Interdisciplinaryand Int. Researcher Development (iLIM-2),Nagoya, Japan ,(2017.09.29-2017.10.02) K. Takenaka
G. Uchida
K. Ide
T. Kamiya
Y. Setsuhara
Advanced ICP-Enhanced Plasma Systems for Meters-Scale Large-Area Processes The 11th Asian-European International Conference on Plasma Surface Engineering,Jeju, Korea,(2017.09.11-2017.09.15) Akinori Ebe
Kazuaki Nishisaka
Kazuto Okazaki
Atsushi Osawa
Kosuke Takenaka
Yuichi Setsuhara
Functional Thin Film Deposition by Advanced Plasma Assisted CVD & PVD Process International union of materials research societies-The 15th International conference of advanced materials,Kyoto, Japan,(2017.08.27-2017.09.01) Kosuke Takenaka
Masashi Endo
Giichiro Uchida
Y. Setsuhara
プラズマ生成の基礎とプラズマ制御 第11回プラズマエレクトロニクスインキュベーションホール,静岡,(2017.08.24-2017.08.26) 内田 儀一郎
プラズマ医療科学の発展に向けて~ 医療用プラズマ源,プラズマ計測の観点から ~ 公開シンポジウム「プラズマ医療科学の未来を若手が語る会in日本橋 」,東京,(2017.05.19-2017.05.21) 内田 儀一郎
竹田 圭吾
 
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